Why are CVD reactors polished for polysilicon production?

A high-luster, electropolished interior sheds fewer particles and metallic contaminants into the deposited silicon, resists the process chemistry, and is easier to clean between runs.

Do you electropolish UHP gas lines for silane and trichlorosilane service?

Yes. Harrison electropolishes tubing, manifolds and fittings for ultra-high-purity gas and chemical delivery, then cleans and packages them for installation.

What surface roughness can you achieve?

That depends on the starting surface and the alloy; mechanical polishing followed by electropolishing reaches the low-Ra finishes UHP specifications call for. Tell us the target and we will confirm it before quoting. Ra readings are provided with the parts.

Is this the same process you use for semiconductor equipment?

Yes. Solar and polysilicon equipment uses the same ultra-high-purity electropolishing, cleaning and packaging practice as semiconductor process equipment.

How large a reactor section can you handle?

The Houston facility has four overhead cranes and 15,000 lb material-handling capacity. Larger vessels can be evaluated for on-site work.

Electropolishing for Solar and Polysilicon Production Equipment

High-luster polished stainless steel reactor interior for polysilicon production at Harrison Electropolishing

The short answer: Polysilicon and solar-cell manufacturing use the same ultra-high-purity surfaces as the semiconductor industry: chemical vapor deposition (CVD) reactors, UHP gas and chemical delivery lines, and process chambers where any particle or metallic contaminant ends up in the product. Harrison has performed high-luster polishing of CVD reactors used for polysilicon production and electropolished transfer lines for ultra-high-purity polycrystalline producers. The work is done under an ISO 9001 quality system with Ra documentation and certificates of conformance.

What we finish for solar and polysilicon customers

CVD reactor bells and bases. High-luster mechanical polishing and electropolishing of reactor interiors used to deposit polysilicon.

UHP gas and chemical delivery lines. Electropolished tubing, manifolds and fittings for silane, trichlorosilane and process-gas service, cleaned and packaged for installation.

Process chambers, vessels and transfer lines. Interior electropolishing to a specified Ra to reduce particle generation and contamination.

Wafer-handling and wet-process hardware. Stainless components electropolished and passivated for chemical resistance and cleanability.

Why electropolished surfaces are the standard

Electropolishing removes the outer layer of metal along with embedded iron and the smeared, stressed surface left by machining. What remains is a chromium-enriched, featureless surface that sheds fewer particles, outgasses less, resists corrosive process chemistry and cleans completely. For a polysilicon producer that means less contamination of the deposited silicon and longer intervals between reactor cleanings. Work is performed to ASTM B912 and the customer's surface-roughness specification; see our semiconductor page for SEMI F19 and UHP cleaning and packaging practice.

Capacity

The Houston facility has four overhead cranes and 15,000 lb material-handling capacity for reactor sections and large vessels. Harrison has polished high-purity equipment for solar and semiconductor producers since 1980, is ISO 9001 and ISO 14001 certified, and offers expedited service; lead times vary with shop load.

Representative project

A polysilicon producer expanding capacity needed the interiors of a set of CVD reactor bells polished to a high-luster finish and the connecting stainless transfer lines electropolished to a specified Ra before installation. Harrison mechanically polished and electropolished the reactor interiors, electropolished the transfer lines and fittings, verified surface roughness, cleaned and packaged the components, and delivered Ra readings with certificates of conformance. The equipment was installed without rework.

Request a solar equipment quote

Tell us the component, the alloy, the Ra or finish specification, the cleaning and packaging required, and your delivery date. We quote within one business day.

Request a Quote · Call 800-245-5707

More to Know

Frequently Asked Questions

Why are CVD reactors polished for polysilicon production?

A high-luster, electropolished interior sheds fewer particles and metallic contaminants into the deposited silicon, resists the process chemistry, and is easier to clean between runs.

Do you electropolish UHP gas lines for silane and trichlorosilane service?

Yes. Harrison electropolishes tubing, manifolds and fittings for ultra-high-purity gas and chemical delivery, then cleans and packages them for installation.

What surface roughness can you achieve?

That depends on the starting surface and the alloy; mechanical polishing followed by electropolishing reaches the low-Ra finishes UHP specifications call for. Tell us the target and we will confirm it before quoting. Ra readings are provided with the parts.

Is this the same process you use for semiconductor equipment?

Yes. Solar and polysilicon equipment uses the same ultra-high-purity electropolishing, cleaning and packaging practice as semiconductor process equipment.

How large a reactor section can you handle?

The Houston facility has four overhead cranes and 15,000 lb material-handling capacity. Larger vessels can be evaluated for on-site work.

Request a Quote

800-245-5707

Electropolishing

Harrison Electropolishing, the Leading Electropolishing, Passivation, Oxygen Cleaning & Mechanical Polishing Company World Wide.

Electropolishing is an electrochemical process by which surface material is removed by anodic dissolution. Electropolishing removes surface material, beginning with the high points within the microscopic surface texture. By removing these points, the electropolishing process will improve the surface finish of a metal such as stainless steel, nickel, and Hastelloy, leaving a smoother and more reflective surface. Common parts and components electropolished include tanks, piping, fittings, rods, discs, large parts & surfaces, and more.